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与包括原子力显微镜在内的其他压痕形貌测量方法相比,光学显微镜以其非接触、大测量范围及较快的测量速度等优点在硬度测试中应用广泛,但包括共焦显微镜在内的常规显微镜其分辨率,特别是纵向分辨率,一直不能满足要求.为此开发了一种沿光轴方向的具有纳米分辨率的压痕成像系统.该系统基于层析全场显微术,即在常规光学显微镜的基础上引入结构光照明,应用移相方法得到样品的三维形貌.成像系统样机的测量结果表明,系统的纵向分辨率可达2,nm,可以高精度地实现压痕的三维形貌测量,并量化揭示纳米压痕测试中常见的“坟起(pile-up)”及“沉入(sink-in)”现象.该系统有助于进一步研究显微及纳米硬度计量方法并降低计量的不确定度.
Compared with other indentation morphology methods, including AFM, optical microscopy is widely used in hardness testing due to its advantages of non-contact, large measuring range and fast measuring speed. However, including confocal microscopy Conventional microscopes have not been able to meet their requirements in terms of resolution, especially vertical resolution, and for this reason, an indentation imaging system with nanometer resolution along the optical axis has been developed.The system is based on tomographic field microscopy The structured light illumination was introduced on the basis of the conventional optical microscope, and the three-dimensional morphology of the sample was obtained by using the phase-shifting method. The measurement results of the imaging system prototype showed that the longitudinal resolution of the system can reach 2 nm and achieve the indentation with high accuracy Three-dimensional topography measurements and quantification reveal common “pile-up” and “sink-in” phenomena in nanoindentation testing. The system is useful for further study of microscopic and Nano-hardness measurement methods and reduce the measurement uncertainty.