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We fabricate three surface patterning zinc oxide(ZnO) ordered arrays on glass substrates by using nanosphere lithography technique and dc magnetron sputtering technique. The crescent, tube and honeycomb surface morphologies of the samples are observed by scanning electron microscopy. The transmittance, fluorescence and confocal Raman spectra of the sample are measured. Obviously, when the angle between the plume and the substrate is 90?, the honeycomb arrays have a better transmission. Additionally, the PL intensity of honeycomb arrays is superior. With the increasing of the angle between the substrate and the sputtering plume, the fluorescence peak shows blue shift. The Raman peak located at438 cm-1belongs to ZnO E2(high) mode, which corresponds to the characteristic band of the hexagonal wurtzite phase.The tube arrays have the best Raman spectrum intensity.
We fabricate three surface patterning zinc oxide (ZnO) ordered arrays on glass substrates by using nanosphere lithography technique and dc magnetron sputtering technique. The crescent, tube and honeycomb surface morphologies of the samples are observed by scanning electron microscopy. The transmittance, fluorescence and confocal Raman spectra of the sample are measured. Obviously, when the angle between the plume and the substrate is 90 ?, the honeycomb arrays have a better transmission. With the increasing of the angle between the The Raman peak located at438 cm-1 belongs to ZnO E2 (high) mode, which corresponds to the characteristic band of the hexagonal wurtzite phase. The tube arrays have the best Raman spectrum intensity .