论文部分内容阅读
本文提出了一种新的圆光栅测量系统──多进制圆光栅数字测量系统。并对其测量原理、制造方法及实验结果进行了讨论。
In this paper, a new round grating measurement system ─ ─ multi-scale circular grating digital measurement system. And its measurement principle, manufacturing method and experimental results are discussed.