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给出了一种用于复杂表面形状精密纳米加工的探针装置．该探针由一个高速可控的金刚石切割单元(FTC 单元)和一个高灵敏度的压电式力传感器组成．而FTC单元由一个单点金刚石切割工具和一个压电陶瓷晶体 (PZT)驱动器构成．压电陶瓷晶体(PZT)驱动器可对与切削量相对应的金刚石工具的Z向位置进行高速控制,从而实现加工复杂表面形状的目的．加工中的切削力是反映切削进程的重要指标,可由联结于FTC单元的高灵敏度力传感器进行测量．比对了用于联结力传感器和FTC单元的两种设计方法．
A probe device for precision nano-fabrication of complex surface shapes is given. The probe consists of a high-speed controllable diamond cutting unit (FTC unit) and a high-sensitivity piezoelectric force sensor. The FTC unit consists of a single point diamond cutting tool and a piezoelectric ceramic crystal (PZT) driver. Piezoelectric ceramic crystal (PZT) drivers allow high-speed control of the Z-position of the diamond tool corresponding to the amount of cut, thus achieving the purpose of machining complex surface shapes. Cutting force during machining is an important indicator of the cutting process and can be measured by a highly sensitive force sensor coupled to the FTC unit. The two design approaches for coupling force sensors and FTC units are compared.