本文叙述用石墨炉原子吸收光谱法,直接测定半导体材料-磷化铟中微量铁的分析方法。样品用盐酸溶解。测定下限为0.3ppm,相对标准偏差为6％,加入回收率为98％。试验表明,用金属钽的盐溶液涂覆平度热解涂层石墨管,可使铁的吸光度增加2—3倍,测定的精密度也获得显著改善。在石墨炉的一般升温程序中,增加冷却步时,铁的吸光度提高15％左右。 This paper describes the direct determination of trace amounts of iron in indium phosphide by graphite furnace atomic absorption spectrometry. Samples were dissolved with hydrochloric acid. The lower limit of determination was 0.3ppm, the relative standard deviation was 6% and the recovery rate was 98%. Experiments show that the use of metal tantalum salt solution coated flat pyrolytic coating graphite tube, iron absorption can be increased 2-3 times, the determination of the precision has also been significantly improved. In the general furnace temperature program, increase the cooling step, the iron absorbance increased by about 15%.