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提出一种空气相移器并把它用到电子散斑干涉仪上测面内位移。此种相移器具有精度高,相移误差小于1％,制作成本低,使用简便等优点。
An air phase shifter is proposed and used to measure in-plane displacement on an electronic speckle interferometer. Such a phase shifter has the advantages of high precision, less than 1% phase shift error, low manufacturing cost, easy to use and the like.