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从理论上建立了离子束抛光中切向定位误差对加工残差影响的模型,分析发现了该误差对加工残差的影响与面形的梯度有关。特别地分析了定位误差对不同频率成份误差的影响规律,并进行了仿真研究,验证了残差大小与相对定位误差成正比这一结论。同时利用相对定位误差对残差影响理论,评价了KDIBF1600离子束抛光机的设计精度,机床设计精度满足加工要求。
The model of the effect of tangential positioning errors on the machining residuals in ion beam polishing is established theoretically. It is found that the influence of the errors on the machining residuals is related to the gradient of the surface shape. In particular, the influence of positioning error on the error of different frequency components is analyzed and the simulation study is carried out to verify the conclusion that the residual error is proportional to the relative positioning error. At the same time, the relative positioning error on the residual impact theory, evaluate the KDIBF1600 ion beam polishing machine design accuracy, machine design accuracy to meet the processing requirements.