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以正硅酸乙酯为前驱体,以溶胶-凝胶法制备SiO2溶胶并且采用提拉法在玻璃基片上制备二氧化硅薄膜。研究了反应过程中反应温度、反应时间、催化剂、乙醇和水的加入量对溶胶性质和成膜性能的影响,研究了提拉速度和焙烧温度对二氧化硅薄膜润湿性能的影响。实验结果表明,适宜的反应条件为:反应物的摩尔比TEOS∶EtOH∶H2O=1∶1.5∶1.0,反应温度70℃,pH=3,反应时间1h,薄膜适宜的焙烧温度为450℃。所制备出的二氧化硅薄膜均匀透明,润湿性能良好。
SiO 2 sol was prepared by sol - gel method using tetraethylorthosilicate as precursor and silica film was prepared on glass substrate by Czochralski method. The effects of reaction temperature, reaction time, amount of catalyst, ethanol and water on the properties and film-forming properties of the sol were investigated. The effects of pulling speed and calcination temperature on the wettability of the silica film were investigated. The experimental results show that the suitable reaction conditions are: molar ratio TEOS: EtOH: H2O = 1: 1.5: 1.0, reaction temperature 70 ℃, pH = 3 and reaction time 1 h, and the optimum calcination temperature is 450 ℃. The prepared silicon dioxide film is uniform and transparent and has good wettability.