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采用自增强技术与硅压阻效应研制了超高压力传感器,该传感器能够消除封装残余应力的影响并保证其在进行大量程压力测量时具有较高的灵敏度输出。该传感器的弹性元件为圆筒结构的高强度弹簧钢,敏感元件为平膜倒杯式硅压阻芯片。传感器工作时,超高压力作用在圆筒结构的金属弹性元件使其发生轴向位移,该位移量通过弹性元件顶端的传递杆施加到周边固支的硅压阻芯片上,使置于此处的4个电阻条阻值发生线性变化,从而输出与被测压力成正比的电压值。在研究弹性元件在1 000MPa超高压力下的工作性能时,理论与仿真相结合研究了弹性元件的承载强度,确定采用自增强处理技术提高弹性元件的承载能力。最后,对封装好的传感器静态性能进行了标定实验。实验结果表明,该传感器能够承受1 000MPa以上的工作压力,线性度为0.52%,满足工业领域的应用需求。
Self-reinforced technology and silicon piezoresistive effect developed high pressure sensor, the sensor can eliminate the impact of the package residual stress and ensure that it has a high sensitivity of the pressure measurement in a large range of output. The elastic element of the sensor is a cylinder structure of high-strength spring steel, and the sensing element is a flat membrane inverted cup silicon piezoresistive chip. Sensor work, the ultra-high pressure on the cylindrical structure of the metal elastic member so that it axial displacement, the displacement through the top of the elastic member of the transfer lever applied to the peripheral fixed silicon piezoresistive chip, so placed here The resistance of the four resistors changes linearly, thus outputting a voltage proportional to the measured pressure. When studying the working performance of the elastic element under the pressure of 1 000 MPa, the bearing strength of the elastic element was studied by theory and simulation, and the self-reinforcing treatment technology was used to improve the bearing capacity of the elastic element. Finally, the static performance of the packaged sensor was calibrated. Experimental results show that the sensor can withstand more than 1 000 MPa working pressure, linearity of 0.52%, to meet the needs of industrial applications.