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用ＰＥＣＶＤ方法制备了ＳｎＯ２超微粒非晶薄膜，对薄膜进行敏感特性测拭结果表明此薄膜只对乙醇敏感，通过ＳｎＯ２薄膜的真空系统的电阻测定和ＳｎＯ２表面光电子能谱分析，发现乙醇是与ＳｎＯ２薄膜上吸附的Ｏ－起作用，即ＳｎＯ２薄膜表面的Ｏ－的存在，乙醇才能使ＳｎＯ２薄膜的电阻有明显变化。
The SnO2 ultrafine amorphous film was prepared by PECVD and the sensitivity of the film was measured. The results showed that the film was only sensitive to ethanol. The SnO2 thin film was measured by resistance measurement and SnO2 surface photoelectron spectroscopy. O - adsorption on the membrane plays a role, that is, the presence of O - on the surface of SnO2 thin film, ethanol can make SnO2 thin film resistance have significant changes.