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基于光热偏转光谱术建立起来的扫描式光热显微镜,测量了激光损伤薄膜的吸收率分布。其检测灵敏度为2.5×10~(-6)测量准确度为1S％。
A scanning photothermal microscope based on photothermal deflection spectroscopy was used to measure the absorption rate distribution of laser damaged films. The detection sensitivity of 2.5 × 10 -6 (-6) measurement accuracy of 1S%.