目前,随着科学技术的发展,航空工业、宇航工业对膜层质量提出了更高的要求。离子镀是一种新工艺,它的沉积速率高、附着力强、针孔少。目前,国内流行的是普通离子镀,这种离子镀有它的不足,即离子浓度受到限制。我们对提高离子浓度进行了研究,并对装置和 At present, with the development of science and technology, aviation industry and aerospace industry put forward higher requirements on the quality of the coating. Ion plating is a new technology, its high deposition rate, strong adhesion, pinhole less. At present, the popular domestic ordinary ion plating, ion plating with its lack of that ion concentration is limited. We studied to improve the ion concentration, and the device and