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利用体视显微镜和扫描电子显微镜观察Nd:YAG固体脉冲激光铣削的单晶硅表面形貌,利用能谱分析仪EDAX对铣削表面进行成分分析。不同功率密度的激光铣削的单晶硅表面形貌差别比较大,其表面化学成分也存在较大差别。
The morphology of single crystal silicon surface of Nd: YAG solid pulse laser milling was observed by stereomicroscope and scanning electron microscope. The composition of the milling surface was analyzed by energy dispersive spectroscopy (EDAX). Different power density laser milling monocrystalline silicon surface topography is quite different, the surface chemical composition there is a big difference.