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微细加工技术是由半导体、薄膜等微型器件发展而带动起来的一门新技术。这门技术的加工过程是原子、分子、离子和电子间的相互作用,伴随着物理、化学、光、声、电的综合效果。在加工过程中,要几种工艺手段前后交错,相互渗透以达到预期的工艺要求。微细加工技术的建立促进了集成光学,声表面波器件、磁泡器件、激光陀螺、光纤陀螺、超导器件等新型器件的出现和发展。
Microfabrication technology is a new technology driven by the development of micro-devices such as semiconductors and thin films. The processing of this technology is the interaction of atoms, molecules, ions and electrons with the combined effect of physics, chemistry, light, sound and electricity. In the process of processing, to several techniques before and after staggered, mutual penetration in order to achieve the desired process requirements. The establishment of microfabrication technology has promoted the emergence and development of new devices such as integrated optics, surface acoustic wave devices, bubble devices, laser gyros, fiber optic gyros and superconducting devices.