一、前言 目前在超高真空测量中B—A规是最常用的,其上限一般为104～10-3托。真空设备中为了连续测量低真空至超高真空范围的压强变化,往往要用两只以上规管,给实际使用和自控操作方面带来不便和困难。为了适应真空技术的发展,拓展B—A规的上限,作成能测量从低真空到超高真空的 I. Introduction At present, B-A gauge is the most commonly used in ultra-high vacuum measurement, and its upper limit is generally 104-10-3 torr. In order to continuously measure the pressure change in the vacuum range from low vacuum to ultra-high vacuum, more than two regulations are often required in vacuum equipment, which brings inconvenience and difficulty to practical use and self-control operation. In order to adapt to the development of vacuum technology, expand the upper limit of B-A gauge and make it possible to measure the pressure from low to ultra-high vacuum