接触式台阶测量仪是ＬＳＩ生产工艺中的重要检测仪器，其中，触针是关键部件之一。本文叙述了触针对膜层台阶表面测量的影响，包括：触针的形状、尺寸对表面形貌测量中的水平分辨力的限制；选择合适的触针测量力及针尖形状，实现对样本表面的无损测量。同时，本文推导出相应的公式，为提高触针测量的精度提供了理论依据。 Contact step measuring instrument is an important detection instrument in the LSI production process, in which the stylus is one of the key components. This article describes the impact of stylus on the step surface measurement of the film, including: the shape and size of the stylus limit the horizontal resolution in the measurement of surface topography; select the appropriate stylus measuring force and the shape of the tip, Non-destructive measurement. At the same time, this article deduces the corresponding formula, which provides a theoretical basis for improving the accuracy of stylus measurement.