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应用减速场分析器（RFA）俄歇能谱仪得到直接谱N（E）－E，经计算机程序处理保存谱形方面的信息，并应用于软X射线光学Mo-Si多层膜介面的研究中。并说明经H＋离子轰击的界面谱形。
The direct spectrum N (E) -E was obtained by RFA Auger spectroscopy, and the information about the preservation of spectra was processed by computer program and applied to the study of soft X-ray optics Mo-Si multilayers in. And explain the interface spectrum bombarded by H + ions.