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本文对N沟道亚微米器件在不同应力条件下的热载流子退变特性进行了实验研究。实验结果表明:热空穴注入对器件的热载流子退变特性有重要影响。文章对不同应力条件下器件中的热空穴注入与热电子注入的相互作用进行了分析。
In this paper, the hot carrier degeneration characteristics of N-channel sub-micron devices under different stress conditions were experimentally studied. The experimental results show that the hot hole injection has an important influence on hot carriers degeneration characteristics. The interaction between hot hole injection and hot electron injection in devices under different stress conditions is analyzed.