一、概述 机械增压泵即通常所谈的罗茨真空泵。它是一种用机械的方法来获得“中真空”的设备。是一种高速旋转机械。 机械增压系与目前应用较为广泛的油封机械真空泵,油扩散泵相比有其十分重要的特点; (1)机械增压泵在5×10-1×10-2托压强范围内,具有稳定的大抽速,可达名义抽速 First, an overview Mechanical booster pump that is usually talked about Roots vacuum pump. It is a mechanical way to get a “medium vacuum” of equipment. Is a high-speed rotating machinery. Compared with the oil-sealed mechanical vacuum pump and oil diffusion pump, the mechanical supercharging system has the very important characteristics compared with the widely used oil-sealed mechanical vacuum pump. (1) The mechanical booster pump is stable in the pressure range of 5 × 10-1 × 10-2 Torr Big pumping speed, up to the nominal pumping speed