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本文介绍了制备ＺｎＯ薄膜的常见方法和影响薄膜结构的主要因素，并已在Ｓｉ衬底上利用直流反应磁控溅射法制备出Ｃ轴取向高度一致的ＺｎＯ薄膜
This paper introduces the common methods of preparing ZnO thin films and the main factors that affect the structure of the thin films. The ZnO thin films with uniform C-axis orientation have been fabricated on Si substrate by DC reactive magnetron sputtering