一、引言近年来,人们为了解决球面光学零件可随意地检测其曲率半径及面形误差问题,陆续研制出激光球面干涉仪和全息补偿球面干涉仪。前者有一整套结构复杂、要求极高的标准镜头,后者虽然用全息补偿板的办法降低了对标准镜头设计和加工精度的要求,但两者仍然存在着球面顶点干涉花样由于波面横向颠倒,定位不准,球径测量精度下降问题;补偿板显定影处理后条纹的不对称变异以及随被检测球面曲率半径增加而程差增大,从而造成对激光光源纵模(时间相干性)要求提高或者使干涉条纹对 I. INTRODUCTION In recent years, in order to solve the problem that spherical optical parts can freely detect the curvature radius and surface shape error, people have successively developed laser spherical interferometer and holographic compensated spherical interferometer. The former has a complete set of complicated and demanding standard lenses. Although the latter reduces the requirements of standard lens design and machining accuracy by using a holographic compensating plate, both of them still have spherical vertex interference patterns. Since the wave front is laterally reversed and positioned The accuracy of the ball diameter is not reduced; the unevenness of the fringes in the compensation plate after the fixing process increases and the path difference increases as the radius of the curvature of the detected sphere increases, thereby increasing the requirement on the longitudinal mode (temporal coherence) of the laser light source or Make interference fringe pairs