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一、前言热解氮化硼(PBN)是一种新型陶瓷材料。这种材料有各向异性与各向同性之分。据文献报道前者用途较广,而后者尚限于几方面的应用。本文研究前者。PBN 材料,从六十年代末,七十年代初国外已从研究进入生产,开始有商品出售,如今已广泛应用在宇航、电子、电工、化工、冶金、医疗等各领域。由于PBN 的物理和化学性能比较稳定,在半导体材料的制备上有着特殊的价值。如分子束外延用坩埚、到液相外延用的舟皿、砷化镓单晶坩埚都要用它。分子束外延用束源坩埚
First, the preface Pyrolysis boron nitride (PBN) is a new type of ceramic materials. This material is anisotropic and isotropic. According to the literature, the former is widely used, while the latter is still limited to several applications. This article studies the former. PBN materials, from the late 1960s and early 1970s, have gone from research to production and started to be sold in commodities. They are now widely used in various fields such as aerospace, electronics, electrical engineering, chemical engineering, metallurgy and medical treatment. Due to the relatively stable physical and chemical properties of PBNs, PBNs are of special value in the preparation of semiconductor materials. Such as molecular beam epitaxy crucible, to the liquid phase epitaxy boat, gallium arsenide single crystal crucible should use it. Molecular beam epitaxy with beam source crucible