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本文概述了X射线衍射法测厚中诸方法的本质差别,给出各种方法的确切命名,并提出了合理的分类;为表面膜多级衍射法推导出了简明的测厚公式,大大简化了数据处理过程;运用微分原理和统计学原理求得了相对误差公式,指明了该方法误差的主要来源,并可按误差要求预先推算出可测的最大和最小厚度及合理选用实验参数。以铝箔,镍箔和镀金膜作了实试验证,获得满意结果。
In this paper, the essential differences of X-ray diffraction methods are summarized. The exact nomenclature of each method is given and a reasonable classification is given. A concise thickness measurement formula is deduced for surface film multi-level diffraction method, which greatly simplifies The data processing is carried out. The formula of relative error is obtained by using the principle of differential and the principle of statistics, the main source of the error of the method is pointed out, and the maximum and the minimum measurable thickness can be calculated in advance according to the error requirement. With aluminum foil, nickel foil and gold-plated film made a real test certificate, get satisfactory results.