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用计算全息(CGH)模拟理想非球面主镜的反射波面,用补偿器对该计算全息进行检验,只要计算全息的制作误差能够满足要求,就能实现直接对补偿器的标校。介绍了计算全息标校补偿器的原理、方法,并进行了误差分析。实验采用电子束制作的计算全息实现了对850 mm F/2抛物面主镜补偿器的标校,补偿器产生的标准非球面精度不低于计算全息模拟的主镜面形精度,均方根(RMS)误差为0.012λ。研究表明,用计算全息模拟主镜反射波面对补偿器进行标校是一种行之有效的方法,结合先进的微电子制造技术,可实现对补偿器的高精度标校。
The computational holography (CGH) is used to simulate the reflection wave surface of an ideal aspherical primary mirror, and the compensator is used to test the calculated hologram. The calibration of the compensator can be realized as long as the manufacturing error of the calculated hologram can meet the requirement. The principle and method of calculating holographic calibration compensator are introduced and the error analysis is carried out. The experimental calibration of a 850 mm F / 2 parabolic primary mirror compensator was performed using computational holography using electron beams. The standard aspheric accuracy produced by the compensator was not less than that of the primary mirror-shaped accuracy of the computed holographic simulation. The root mean square RMS) error is 0.012λ. The research shows that it is an effective method to calibrate the compensator by calculating the holographic mirror reflection wavefront. Combining the advanced microelectronic manufacturing technology, it is possible to calibrate the compensator with high accuracy.