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基于薄膜滤光片角度调谐的基本原理,实现了一种具有较宽波长调谐范围的可调窄带滤光器。通过优化机构装置参量,利用步进电机精确控制滤光片的入射角度。通过对多腔窄带薄膜滤光片的膜系结构及其等效折射率的计算,得到了滤光片透射中心波长与入射角度的关系式。制备了一个包括步进电机及转动机构在内的滤波器角度调谐装置,在1543～1563nm的波长调谐范围内取得误差在±0.1nm以下的波长定位精度,达到当前对100GHz信道间隔滤波器的定位精度要求。
Based on the principle of tuning the angle of the thin film filter, a tunable narrowband filter with wider wavelength tuning range is realized. By optimizing the device parameters, the stepping motor is used to precisely control the incident angle of the filter. Through the calculation of the film structure and its equivalent refractive index of the multi-cavity narrow-band thin-film filter, the relation between the transmission center wavelength and the incident angle of the filter is obtained. A filter angle tuning device including a stepping motor and a rotating mechanism was manufactured to obtain the wavelength positioning accuracy with the error within ± 0.1nm within the wavelength tuning range of 1543-1563nm and achieve the current positioning of the 100GHz channel spacing filter Accuracy requirements.