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四、成份分析技术 4.1 X射线能谱的无标样定量分析电子探针仪是一种常规的微区成份分析仪器,它主要是利用电子束去激发试样产生X射线谱,然后依据莫塞莱定律去分析试样的成份。按测量的物理量分,可以分为X射线光谱分析法(WDAX)和X射线能谱分析法(EDAX)两种,其中能谱分析法具有检测效率高、分析速度快、在两三分钟内就能完成全元素的同时分析等优点,因而受到重视。
Fourth, the composition analysis technology 4.1 X-ray spectrometry standard sample-free quantitative analysis Electronic probe is a conventional micro-component analysis instrument, which is mainly used to generate electron beam to generate X-ray spectra of the sample, and then according to Mose Lai law to analyze the composition of the sample. Measured by the physical quantity points, can be divided into two kinds of X-ray spectroscopy (WDAX) and X-ray energy spectrum analysis (EDAX), which has high detection efficiency spectrum analysis, analysis speed, in two or three minutes Can be completed at the same time all elements of the advantages of analysis, which have been valued.