上文中我们就对集成电路管芯成品率影响较大的光刻质量,版面设计等六个工艺因素进行了分析。现在我们再从工艺程序等四个方面对管芯成品率的影响作一讨论。 一、工艺程序的设置对成品率的重要影响 使用怎样的工艺程序(包括规范和条件)来完成电路管芯的制作,对成品率的影响是巨大的。例如,对于TTL电路,我们可以对比下边四种程序的安排,就可看出问题的 In the above, we have a great impact on the yield of integrated circuit die lithography quality, layout and other six process factors were analyzed. Now we will discuss the impact of the die yield from four aspects such as process procedures. First, the process of setting the program on the yield important impact on the use of what process procedures (including norms and conditions) to complete the circuit die production, the impact on yield is enormous. For example, TTL circuit, we can compare the arrangement of the following four procedures, we can see the problem