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在众多金刚石薄膜生长的方法中,热灯丝法是其中重要的一种。为了研究其生长机理,人们使用了多种原位测量反应基团的方法,如质量谱、红外吸收、紫外吸收等,对基团的种类、作用及气相如何转变为固相进行了研究,并得到一些重要的结果。但是所有这些方法都没有能给出有关反应基团的空间分布的信息。由于在反应区域中存在三场,即质量场、流量场和温度场,因此反应基团在空间上的分布是极不均匀的。为了弄清反应基团的作用,必须进一步研究反应基团的空间分布,特别是衬底表面附近的分布。本文将原位光发射谱方法应用于电子增强的热丝法生长金刚石薄膜的生长过程,并实现了空间分辨探测,给出有关反应基团在空间分布上的信息,发现衬底表面附近的基团分布与其他区域是截然不同的。
In many diamond film growth methods, hot filament method is one of the important. In order to study its growth mechanism, a variety of methods for in situ measurement of reactive groups, such as mass spectrometry, infrared absorption, ultraviolet absorption, etc., have been used to study the type and action of groups and how the gas phase is transformed into a solid phase. Get some important results. However, none of these methods gives any information about the spatial distribution of reactive groups. Due to the presence of three fields in the reaction zone, namely the mass field, the flow field and the temperature field, the spatial distribution of the reactive groups is very non-uniform. In order to clarify the role of reactive groups, the spatial distribution of reactive groups must be further investigated, particularly in the vicinity of the substrate surface. In this paper, the in-situ optical emission spectrum method is applied to the growth process of electron-enhanced hot wire growth diamond film, and the spatial resolution detection is realized. The information on the spatial distribution of reactive groups is given. It is found that the base near the substrate surface Mission distribution is very different from other regions.