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介绍了10～80mm’的硅(锂)X射线探测器研制工艺,并讨论了工艺过程和测量中的一些问题;给出了探测器的指标,这些指标大都达到和接近国外同类产品水平。硅(理)X射线探测器是一种低能X射线探测器,它具有能量分辨率高、线性好,对低能区X射线探测效率高等特点,在核物理、医学、地矿、环保等领域有着广泛的应用。它也是扫描电镜X射线荧光分析等能谱分析的核心部件。
The development of 10 ~ 80mm ’silicon (lithium) X-ray detector was introduced. Some problems in the process and measurement were discussed. The indicators of the detector were given. Most of these indicators reached and approached the level of similar foreign products. Silicon (理) X-ray detector is a low-energy X-ray detector with high energy resolution, good linearity and high efficiency in detecting low-energy X-ray radiation. It is widely used in nuclear physics, medicine, mining, environmental protection and other fields Wide range of applications. It is also the core component of energy spectrum analysis such as X-ray fluorescence analysis of scanning electron microscopy.