【摘 要】
：
The TiN, TiAlN, and TiAlSiN coatings were prepared on YT14 cutting tool surface with CAIP (cathode arc ion plating), the surface morphologies and phases were analyzed with FESEM (field emission scanning electron microscopy), and XRD (X-ray diffraction), r
【机 构】
：
School of Petrochemical Engineering, Changzhou University, Changzhou 213164, China;College of Mechan
【出 处】
：
武汉理工大学学报（材料科学版）（英文版）
论文部分内容阅读
The TiN, TiAlN, and TiAlSiN coatings were prepared on YT14 cutting tool surface with CAIP (cathode arc ion plating), the surface morphologies and phases were analyzed with FESEM (field emission scanning electron microscopy), and XRD (X-ray diffraction), respectively, and the coating parameters such as 3D surface micro-topography, grain size, surface height, hierarchy, proifle height, and power spectral density, etc, were measured with AFM (atomic force microscope). The results show that the phases of TiN, TiAlN, and TiAlSiN coatings are TiN, TiN+TiAlN, TiN+Si3N4+TiAlN, respectively, while the surface roughnessSaof TiN, TiAlN, and TiAlSiN coatings is 75.3, 98.9, and 42.1 nm, respectively, and the roughness depthSk is 209, 389, and 54 nm, respectively, the sequence of average grain sizes is TiAlN>TiN>TiAlSiN. The surface bearing index Sbi of TiN, TiAlN, and TiAlSiN coatings is 0.884, 1.01, and 0.37, respectively, and the sequence of surface bearing capability is TiAlN>TiN>TiAlSiN. At the lower wavelength (102-103 nm), the power spectral densities have a certain correlation, and the sequence of TiN>TiAlN>TiAlSiN, while the correlation is low at the higher wavelength (>103 nm).
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