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一种维氏显微硬度大于1800kPa/mm~2的涂层已经用二极管发光放电的方法生产出来。该涂层含有大量的氢(随着沉积参数的变化,组成从CH_(0.05)变化到CH_(0.50))。涂层耐酸、碱腐蚀,不含气孔,具有较高的抗刻痕性,在空气中400℃以下,在真空中900℃以下是很稳定的。其折射率可在小于1.8到大于2.1之间调整,对大于1.5微米的波长是高度透明的。如图1所示,在可逆振荡模型中使用一个改进的阴极溅镀装置,可以将碳氢化合物气体分子裂解、离化并和接地的沉积样品表面上的固态聚合物结合。带负电荷的阴极把
A coating with Vickers microhardness greater than 1800 kPa / mm ~ 2 has been produced using a diode luminescent discharge. The coating contains a large amount of hydrogen (composition changes from CH 0.05 to CH 0.50 as the deposition parameters change). Coating acid, alkali corrosion, non-porous, with high anti-scoring, in the air below 400 ℃, below 900 ℃ in vacuum is very stable. Its refractive index can be adjusted between less than 1.8 and more than 2.1 and is highly transparent to wavelengths greater than 1.5 microns. As shown in FIG. 1, an improved cathode sputtering apparatus is used in the reversible oscillation mode to crack, ionize, and combine hydrocarbon gas molecules with a solid polymer on the surface of a grounded deposited sample. Negatively charged cathode handle