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本文利用扫描电声显微镜成像技术对铁电半导体陶瓷材料进行了无损成像观察和分析。通过对不同条件下获得的电声像的讨论,得出在这种材料的电声成像中,热波耦合机制和压电耦合机制对电声信号的产生均有着贡献,但热波耦合机制占主导地位。另外扫描电声显微镜在对材料的亚表面缺陷无损观察方面有着其它观察手段所无法比拟的优点。
In this paper, non-destructive imaging of ferroelectric semiconductor ceramics was observed and analyzed by scanning electroacoustic microscopy. Through the discussion of the electro-acoustic images obtained under different conditions, it is concluded that the thermo-wave coupling mechanism and the piezoelectric coupling mechanism contribute to the electroacoustic signal in the electro-acoustic imaging of this material, but the thermo-wave coupling mechanism leading position. Another scanning electroacoustic microscope in the sub-surface defects on the material non-destructive observation with other means of observation have unmatched advantages.