本文介绍用溶胶-凝胶方法制备钛酸铅镧(PLT)铁电膜,采用划痕法测定PLT膜在Si基片上的附着力,并通过x射线衍射(XRD)测定在各种工艺条件下PLT薄膜的晶格畸变,并计算内应力。实验表明溶胶-凝胶方法的工艺因素对薄膜的力学性质有很大影响。通过控制溶液浓度,热处理温度及薄膜的厚度可得到附着力强,内应力小,品格畸变小的优质膜。 In this paper, a lead-lanthanum titanate (PLT) ferroelectric film was prepared by a sol-gel method. The adhesion of the PLT film on a Si substrate was measured by a scratch test. The X-ray diffraction (XRD) PLT thin film lattice distortion, and calculate the internal stress. Experiments show that the sol-gel process factors have a great influence on the mechanical properties of the films. By controlling the solution concentration, heat treatment temperature and the thickness of the film can be obtained with high adhesion, low internal stress, small distortion of the quality of the film.