国外检漏技术全盛的时期是五十年代中期到六十年代中期，主要是大型金属真空系统的出现迫切需要解决检漏问题。四十年代以前只有简单检漏方法，自１９４３年出现质谱检漏计以后使检漏技术发生了很大跃进，今日的质谱检漏计已成为最重要的检漏方法。但与此同时，简易检漏技术也在深入发展，与质谱检漏互为补充。 １、检漏的一般概念和所用单位。真空设备没有必要把所有漏孔都检出来，每一种装置都允许有一定的漏量；介绍了实际的数据，可作为选择检漏器的参考。介绍了四种标准漏孔，用四凸缘垫圈密封的漏阀，可得１０－１４～１０－１５乇升／秒的最小漏量。 ２、检漏原理。介绍在多漏孔存在时的检漏方程式。此方程式是通用的，即可用干“选择性响应”的检验器，也可用于“唯一响应”检漏器。介绍了最佳检漏的条件。最后列出２０种检漏器的可检最小漏量。 ３、质谱检漏计，质谱检漏计三十多年来有很大发展，但灵敏度始终没有超出１７年前提出的指标： １０－１３乇升／秒。 目前一个动向是用灵敏度较低的仪器检出更小的漏孔。介绍了用１０－１０乇升／秒的仪器检出１０－１５乇升／秒的漏孔的方法。质谱计附加一只小冷吸附泵，可用１０－１０乇升／秒的仪器检出１０－１３乇升／秒的漏孔着重介绍质谱检漏 Foreign leak detection technology, the heyday of the mid-fifties to the mid-sixties, mainly the emergence of large-scale metal vacuum system urgently needed to solve the problem of leak detection. Before the 1940s, there was only a simple leak detection method. Since the appearance of the mass spectrometer leak detector in 1943, the leak detection technology has undergone a great leap forward. Today, the mass spectrometer leak detector has become the most important leak detection method. At the same time, simple leak detection technology is also in-depth development, complement each other with the mass spectrometry leak. 1, the general concept of leak detection and units used. Vacuum equipment is not necessary to detect all leaks, each device allows a certain amount of leakage; introduced the actual data, can be used as a reference leak detector selection. Four types of standard leaks are introduced. Leak-sealed valves sealed with four flange gaskets provide a minimum leak of 10-14 to 10-15 Torr L / sec. 2, leak detection principle. The leak detection equation in the presence of multiple leaks is introduced. This equation is universal, that is, a checker that can be used to do “selective response,” or a “unique response” leak detector. Describes the best conditions for leak detection. Lastly, 20 kinds of leak detector leakable minimum leakage. Mass spectrometer leak detector, mass spectrometer leak detector over the past 30 years have made great progress, but the sensitivity has not exceeded the indicator proposed 17 years ago: 10-13 Torr L / s. One current trend is to detect smaller leaks with less sensitive instruments. A method of detecting a leak of 10-15 Torr liter / second with an apparatus of 10-10 Torr liter / second is described. A small cold mass adsorption pump attached to the mass spectrometer can be used to detect leaks of 10-13 Torr L / s with a 10-10 Torr liter / second instrument focusing on mass spectrometry leak detection