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利用微波等离子体化学气相沉积法在不锈钢衬底上直接合成非晶碳和碳纳米管混合薄膜.采用氢气和甲烷作为反应气体,流量分别为100和16sccm.沉积室内的压强为5.0kPa.利用场发射扫描电镜(SEM)和喇曼谱(Raman)对制备的薄膜的结构和形貌进行了分析.场发射实验在5×10-5Pa的真空下进行.实验结果表明:制备的非晶碳和碳纳米管混合薄膜开启电场较低,仅有0.9V/μm;在电场为3.7V/μm时电流密度达到4.0mA/cm2,发射点密集,分布均匀.表明此种材料是一种优良的场发射冷阴极材料.
The mixed films of amorphous carbon and carbon nanotubes were directly synthesized on a stainless steel substrate by microwave plasma chemical vapor deposition method using hydrogen and methane as reaction gases with flow rates of 100 and 16 sccm, respectively, and the pressure in the deposition chamber was 5.0 kPa. The structure and morphology of the prepared films were analyzed by SEM, Raman spectroscopy.The field emission experiments were carried out under a vacuum of 5 × 10-5Pa.The experimental results show that the prepared amorphous carbon and The electric field of carbon nanotube composite film is low, only 0.9V / μm, the current density is 4.0mA / cm2 when the electric field is 3.7V / μm, and the emission points are dense and evenly distributed, indicating that the material is an excellent field Launch cold cathode material.