随着半导体晶圆生产加工变得越来越复杂,多组合设备也越来越频繁的被采用.多组合设备的调度关键在于怎么协调好相邻机械手的操作.针对拥有2-空间缓冲模块的单臂多组合设备,同时它的瓶颈设备被假设为处于加工-边界,首先运用面向资源的Petri Net对系统进行建模,然后在分析系统调度特性的基础上提出了此多组合设备的周期时间一定可以达到下界,并给出了有效的调度算法.最后,用实例证明了该调度方法的可操作性. As semiconductor wafers become more and more complex, multi-component devices are being used more and more frequently.The key to the scheduling of multi-component devices lies in how to coordinate the operation of adjacent robots.For the purpose of having 2-space buffer module At the same time, its bottleneck equipment is assumed to be at processing-boundary. First, the system is modeled using resource-oriented Petri Net, and then the cycle time of this multi-combination device is proposed based on the analysis of system scheduling characteristics The lower bound must be reached and an effective scheduling algorithm is given.Finally, an example is given to demonstrate the operability of this scheduling method.