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最新AVSCOM工艺计划的实施为高速度生产激光预警接收机的激光红外探测器奠定了基础.Perkin—Elmer公司的光电部承担了能以每周(40小时)生产50个叉状砷化铟探测器的制造方法和工艺的研究工作.探测器由两对叉指梳状的光电元件组成,该光电元件是在一砷化铟圆片上经扩散和台面蚀刻加工而成.每一梳状元件由九根宽0.225毫米、长5毫米且相互平行的梳齿组成.一个梳齿与另一梳状器件的梳齿相互叉开,构成叉指式结构.探测器芯片装在TEKFORM那样的标准集成电路板上.
The implementation of the latest AVSCOM process plan lays the groundwork for a laser-IR detector for high-speed production of laser warning receivers. Perkin-Elmer’s Photovoltaics division is capable of producing 50 forks per week (40 hours) Of the manufacturing methods and processes of research work.The detector consists of two pairs of interdigital comb-shaped optoelectronic components, the optoelectronic components in an indium arsenide wafer by diffusion and mesa etching processing made of each comb-like element by nine Root width of 0.225 mm, 5 mm long and parallel to each other comb teeth .One comb with another comb device comb teeth fork each other to form the interdigital structure. Detector chip mounted TEKFORM standard integrated circuit board on.