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着重给出了一组四极质谱计在高压力范围的工作特性。选用了四种不同长度的圆杆四级滤质器进行研究。所选圆杆四级滤质器的场半径均为2.744mm,场长度分别为30mm、50mm、80mm、140mm。所有四极质谱计都采用尼尔型离子源,离子检测器采用法拉第筒,并且在相同的条件下进行研究。实验结果表明:仪器的线性与滤质器的几何长度、工作频率以及离子进入滤质器的轴向能量有关。分析实验结果认为:滤质器中的离子与离子或分子的碰撞损失效应是决定四极滤质器线性的主要因素。同时还研究了离子进入滤质器时的能量分散对仪器分辨本领的影响,给出了高压力四极质谱计设计的一条有效途径。
Emphasis is given to a set of quadrupole mass spectrometer operating characteristics in the high pressure range. Four round rod quadrupole mass filters of different lengths were selected for research. The field radius of the selected round rod four-stage mass filter is 2.744mm, the field length is 30mm, 50mm, 80mm, 140mm respectively. All quadrupole mass spectrometers employ a Neil-type ion source, the ion detector uses a faraday cup, and studies are performed under the same conditions. The experimental results show that the linearity of the instrument is related to the geometric length of the mass filter, the operating frequency and the axial energy of ions entering the mass filter. The experimental results show that the collision loss effect between ions and molecules in the mass filter is the main factor that determines the linearity of the quadrupole mass filter. At the same time, the effect of the energy dispersion when the ions enter the mass filter on the resolving power of the instrument is studied, and an effective way of designing the high pressure quadrupole mass spectrometer is given.