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1类金刚石剥离膜的制备约5μg/cm2的类金刚石碳(DLC)剥离膜制备方法为:1)甜菜硷作为脱膜剂均匀地涂覆在洁净光滑的玻璃基板上;2)采用交流弧光放电(CAA)法沉积约1μg/cm2的普通碳膜保护层;3)采用过滤阴极真空弧(FCVA)法沉积约4μg/cm2的DLC膜;4)涂覆1层10%~20%的火棉胶溶液;5)在去离子水中脱膜并固定在直径为13 mm的专用靶框上,松弛晾干。2类金刚石碳膜结构的测试分析采用Raman光谱仪和XPS光谱仪对DLC膜的结构进行测试和分析,测试结果如图1所示。Raman光谱测试结果显示制备的DLC膜在1 100~1 900 cm-1之间存在一不对称的宽峰,这是典型的非晶DLC膜的Raman光谱,G峰位置明显向低频方向漂移,D峰和G峰的相对面积之比ID/IG
1 diamond-like release film prepared about 5μg / cm2 diamond-like carbon (DLC) release film preparation method is: 1) betaine as a release agent evenly coated on a clean and smooth glass substrate; 2) AC arc discharge (CAA) method to deposit about 1 μg / cm2 of a common carbon film protective layer; 3) depositing a DLC film of about 4 μg / cm2 using a filtered cathode vacuum arc (FCVA) method; 4) coating a layer of 10-20% Glue solution; 5) deionized in deionized water and fixed to a diameter of 13mm special target frame, dry loose. Test and Analysis of 2-type Diamond Carbon Film Structure The structure of DLC film was tested and analyzed by Raman spectrometer and XPS spectrometer. The test results are shown in FIG. 1. The results of Raman spectroscopy show that there is an asymmetric broad peak between 1 100 and 1 900 cm-1 in the prepared DLC film. This is the Raman spectrum of a typical amorphous DLC film. The position of the G peak shifts to the low frequency direction obviously. The D The ratio of the relative area of the peak to the peak of G ID / IG