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基于棱镜耦合衰减全反射和波导材料热光效应,利用聚合物薄膜平板波导作为温度传感器,论证了影响温度传感器灵敏度的各种因素.结合理论分析及实验验证,温度传感器灵敏度不仅与平板波导上包层及芯层厚度、聚合物材料光学损耗有关,而且与波导的导波模式阶数有关.结果表明,反映温度传感器反射率与温度关系灵敏度的斜率在反射率为零的某阶TE模式下,其值最高.因此,为提高传感器的灵敏度,传感器的入射光外角应选择在反射率为零的某阶TE模式下工作.该聚合物薄膜波导温度传感器具有灵敏度高、结构简单及易制作等特点.
Based on the total reflection of the prism coupling and the thermo-optic effect of the waveguide material, the polymer thin film slab waveguide is used as the temperature sensor, and the various factors that affect the sensitivity of the temperature sensor are demonstrated.Through theoretical analysis and experimental verification, the sensitivity of the temperature sensor is not only contrasted with that of the slab waveguide And the thickness of the core layer, and the optical loss of the polymer material, and is related to the order of the guided wave modes of the waveguide. The results show that the slope reflecting the sensitivity of the temperature sensor’s reflectivity to the temperature is in a TE mode with a certain reflectivity of zero, Therefore, in order to improve the sensitivity of the sensor, the outer corner of the incident light of the sensor should be selected to work in a certain TE mode with a reflectivity of 0. The polymer film waveguide temperature sensor has the characteristics of high sensitivity, simple structure and easy manufacture .