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5. Electromagnetic effects on growth and transport of dust particles in VHF capacitively coupled silane

Electromagnetic effects on growth and transport of dust particles in VHF capacitively coupled silane

来源 :2011年第三届微电子及等离子体技术国际会议 | 被引量 : 0次 | 上传用户：wafh000

【摘 要】

：

Dust particles have been observed in thin film deposition,etching and other surface modification in microelectronics and nanotechnology processes.

【作 者】

：

Xiang-Mei Liu Yuan-Hong Song You-Nian Wang 

【机 构】

：

School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, Chi

【出 处】

：

2011年第三届微电子及等离子体技术国际会议

【发表日期】

：

2011年9期

【关键词】

：

VHF silane discharges two dimensional fluid simulation 

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Dust particles have been observed in thin film deposition,etching and other surface modification in microelectronics and nanotechnology processes.

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