Optical Wave Microphone Measurement during Laser Ablation of Si

来源 :2011年第三届微电子及等离子体技术国际会议 | 被引量 : 0次 | 上传用户：edwardeternity

【摘要】

：

Pulsed laser ablation plasma is used for preparation of thin films and particles.Photo thermal acoustic wave,plasma,shock wave,which is derivative of plasma,and particles are emitted into medium after

【作者】

：

F. Mitsugi R. Ide T. Ikegami T. Nakamiya Y. Sonoda

【机构】

：

Graduate School of Science and Technology Kumamoto University, 2-39-1 Kurokami Kumamoto, Japan

【出处】

：

2011年第三届微电子及等离子体技术国际会议

【发表日期】

：

2011年9期

【关键词】

：

Laser Ablation Plasma Deposition Optical Wave Microphone

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Optical Wave Microphone Measurement during Laser Ablation of Si

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