提供高效率异质结太阳能电池之高质量透明导电氧化物层

来源 :SNEC 第九届(2015)国际太阳能产业及光伏工程(上海)论坛 | 被引量 : 0次 | 上传用户：alanyu97

【摘要】

：

　　硅基异质结太阳电池因为具有高效率、工艺简单与极低的温度系数而被视为下世代太阳电池技术主流。在其制备中，非晶硅钝化层与透明导电膜的沉积为电池效率的关键因子。经由

【作者】

：

陈麒麟

【机构】

：

精曜科技,台湾

【出处】

：

SNEC 第九届(2015)国际太阳能产业及光伏工程(上海)论坛

【发表日期】

：

2015年期

【关键词】

：

高效率异质结太阳能电池高质量透明导电膜等离子体沉积异质结太阳电池化学气相沉积表面复合速率

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论文部分内容阅读

　　硅基异质结太阳电池因为具有高效率、工艺简单与极低的温度系数而被视为下世代太阳电池技术主流。在其制备中，非晶硅钝化层与透明导电膜的沉积为电池效率的关键因子。经由等离子体加强化学气相沉积的工艺调整，我们可以得到极低的载子表面复合速率与超过740mV的隐含开路电压。不同于传统的溅镀制程，反应式等离子体沉积可以得到更好的透明导电膜品质并大幅降低离子轰击所造成的界面损伤。

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提供高效率异质结太阳能电池之高质量透明导电氧化物层

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