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Our work focused on the controllable formation and characterization of semiconductor nanostructures, including a three-dimensional (3D) dense ordered and coupled quantum dot (QD) ensemble, namely, QD crystals (QDCs), and single/double QD nanostructures.The QDs in those specific nanostructures are positioned exactly in the pre-defined nanopits on the Si substrates via different patterning techniques, e.g.nanosphere lithography (NSL) and electron-beam lithography (EBL).