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There are many kinds of calibration methods of vacuum leaks,such as constant volume method,constant pressure method,mass comparison and so on.In the calibration process,helium(He)gas with pressure 100 kPa is usually used as the gas medium.Therefore,this limits the measurement of the leakage rate of specific gas for some production research.In this paper,the vacuum leak with different species and pressures is respectively studied by the constant volume method and helium mass spectrometer leak detector.