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5. Evolution of Plasma Generated Vacuum UV in Diffusion Plasmas

Evolution of Plasma Generated Vacuum UV in Diffusion Plasmas

来源 :2011年第三届微电子及等离子体技术国际会议 | 被引量 : 0次 | 上传用户：hljsd

【摘 要】

：

Vacuum ultraviolet (VUV) radiations generated in low temperature plasmas has been reported to cause wafer damage,alteration of polymer morphology and electrical properties of dielectrics.

【作 者】

：

Toshihisa Nozawa Peter Ventzek Jianping Zhao Lee Chen Merritt Funk Ron Bravenec Radha Sundararajan Koji Koyama 

【机 构】

：

Tokyo Electron Technology Development Institute, Inc., Japan

【出 处】

：

2011年第三届微电子及等离子体技术国际会议

【发表日期】

：

2011年9期

【关键词】

：

Diffusion Plasma Vacuum UV Electron Energy Distribution Functions 

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Vacuum ultraviolet (VUV) radiations generated in low temperature plasmas has been reported to cause wafer damage,alteration of polymer morphology and electrical properties of dielectrics.

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