Growth Mode in Plasma Enhanced ALD of Al2O3 on Different Interfacial Species of pre-treated Plastic

来源 :2011年第三届微电子及等离子体技术国际会议 | 被引量 : 0次 | 上传用户:wendiii
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Atomic layer deposition is used in applications where inorganic or organic materials layers with uniform thickness down to the nanometer range are required.
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