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  5. Laser-induced fluorescence and electric probes for the measurement of plasma flows

Laser-induced fluorescence and electric probes for the measurement of plasma flows

来源 :2011年第三届微电子及等离子体技术国际会议 | 被引量 : 0次 | 上传用户：xdzc2009cccc
【摘 要】
：
To establish and confirm the method of deduction of Mach numbers for the case of collisional plasmas,one needs not only to develop the physical model but also to verify the model by the independent di
【作 者】
：
Kyu-Sun Chung 
【机 构】
：
Department of Electrical Engineering & Center for Edge Plasma Science,Hanyang University, 17 HaengDa
【出 处】
：
2011年第三届微电子及等离子体技术国际会议
【发表日期】
：
2011年9期
【关键词】
：
Plasma flow Mach probe Laser-induced fluorescence collision 
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To establish and confirm the method of deduction of Mach numbers for the case of collisional plasmas,one needs not only to develop the physical model but also to verify the model by the independent diagnostics such as laser-induced fluorescence (LIF) method,since almost all the existing probe theories are for the case of collisionless and stationary plasmas.
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