According to the characteristics of comb-drive structures,the electrical potential field is analyzed;the model based on ......

According to the characteristics of comb-drive structures, the electrical potential field is analyzed; the model based o......

提出一种采用梳齿驱动方式的新型微镜结构,通过外加电压使处于不同高度的可动梳齿与固定梳齿产生转动,带动镜面发生偏转.研究表明:......

This paper summarized and reviewed recent studies of micro transportation systems (MTS) in the MEMS (Micro Electro-Mecha......

In this study, we research about comb-drive micro-structure, which is a MEMS device used to measure velocities and accel......

Comb-drive devises have been widely applied in many fields. However, the application of high frequency sensor, such as r......