As the plasma etching chamber becomes larger,information on spatial distribution of chemically reactive species in plasm......

Two experimental techniques have been used to quantify the atomic oxygen density in the case of hot air plasma generated......

在化学气相沉积功能材料等离子体刻蚀及表面处理等过程中，氢原子起着非常重要的作用。文章详细论述了利用发射光谱技术诊断氢原子的......